Indirect Measurement Methods for Quality and Process Control in Nanomanufacturing
نویسندگان
چکیده
Abstract Rapid advancement over the past decades in nanomanufacturing has led to realization of a broad range nanostructures such as nanoparticles, nanotubes, and nanowires. The unique mechanical, chemical, electrical properties these have made them increasingly desired key components industrial commercial applications. As geometric dimension nano-manufactured products is on sub-micron nanometer scale, different mechanisms effects are involved process compared those for macro-scale manufacturing. Although direct measurement methods using atomic force microscopy electron beam can determine dimensions nano structure with high accuracy, not suited online control quality assurance. In comparison, indirect analyze in-process parameters basis inferring dimensional variations products, thereby enabling feedback This paper provides comprehensive review relevant methods, starting their respective working principles, subsequently discussing characteristics applications terms two approaches: data-based physics-based methods. Relevant mathematical physics models each summarized, together associated effect final product. Based literature conducted, it was found that: (1) measurement, especially method, plays critical role when comes assurance nanomanufacturing, because short processing time (2) method providing way optimize set up geometrical dimensions.
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ژورنال
عنوان ژورنال: Nanomanufacturing and Metrology
سال: 2022
ISSN: ['2520-811X', '2520-8128']
DOI: https://doi.org/10.1007/s41871-022-00148-4